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用离子束辅助沉积技术在９Ｃｒ１８钢基体上形成了ＴｉＣｘＮｙ膜。ＴＥＭ观察膜呈多晶结构，具有（１１１）、（２００）和（２２０）择优取向。ＡＥＳ和ＸＰＳ分析进一步证实，ＴｉＣｘＮｙ膜呈含氧配置。膜的硬度与Ｎ含量有关，Ｎ的含量过高时硬度下降。在本实验条件下以离子注量为３ｘ１０１7／ｃｍ２时硬度最高，干摩擦表明膜的抗氧化性能优良，它的存在能有效抑制基体在摩擦过程中氧化皮的形成，显著改善基体的磨损特性，并能使基体由粘着磨损向磨粒磨损转化．
TiCxNy films were formed on the 9Cr18 steel substrate by ion beam assisted deposition. TEM observation of the film was polycrystalline structure with (111), (200) and (220) preferred orientation. AES and XPS analysis further confirmed that the TiCxNy film was in an oxygen-containing configuration. Film hardness and N content, N content is too high hardness decreases. Under the experimental conditions, the hardness is the highest when the ion fluence is 3 × 10 17 / cm 2, and the dry friction indicates that the film has excellent oxidation resistance. The existence of the film can effectively suppress the formation of oxide scale during the rubbing process and remarkably improve the wear characteristics of the matrix. And can make the substrate from the adhesive wear to abrasive wear transformation.