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为了详细描述等离子体在放电腔内的产生、演化过程,建立了放电腔内部等离子体流动的二维轴对称全粒子数值模型。在考虑壁面二次电子发射影响的前提下,模拟得到了稳态后放电腔内电磁场、电子与离子数密度,电流密度等一系列参数分布,且与相关实验数据进行了比较,吻合较好。模型得到了实验中难以观测到的放电腔内等离子体的产生、演化过程以及稳态下的分布规律,合理解释了放电腔工作的基本原理。
In order to describe the generation and evolution of the plasma in the discharge chamber in detail, a two-dimensional axisymmetric full-particle numerical model of the plasma flow in the discharge chamber was established. Under the premise of considering the influence of wall secondary electron emission, a series of parameter distributions of the electromagnetic field, electron number and ion density, current density and so on in the discharge chamber after steady state are simulated. The results are in good agreement with the relevant experimental data. The model has been difficult to be observed in the experiment of the discharge chamber plasma generation, evolution and steady-state distribution of the law, a reasonable explanation of the working principle of the discharge chamber.