论文部分内容阅读
提出了一种新型的微光学太赫兹辐射探测方法,以双材料微悬臂梁结构热探测方法为基础,通过多重反射光杠杆系统测量微结构的纵向微位移,从而实现太赫兹辐射量的测量。多重反射光杠杆探测方法微位移理论分辨率小于1 nm。搭建了微位移测量系统,实验结果表明,测试系统理论分辨率小于4 nm,实际分辨率优于10 nm。给出了基于该方法的太赫兹探测器设计方案和参数。因其具有良好的抗空气扰动和光束串扰能力,可以在常温下工作,适用于非制冷、实时、低成本、微小型化的太赫兹探测器和阵列式成像设备。
A new method of detecting terahertz radiation in micro-optical system was proposed. Based on the thermal detection method of micro-cantilever structure with double-material materials, the longitudinal micro-displacement of micro-structure was measured by the multi-reflection optical lever system to measure the terahertz radiation. Multiple Reflected Light Lever Detection Method Microdisplacement Resolution is less than 1 nm. The microdisplacement measurement system is set up. The experimental results show that the theoretical resolution of the test system is less than 4 nm and the actual resolution is better than 10 nm. The design scheme and parameters of terahertz detector based on this method are given. Because of its good resistance to air disturbances and beam crosstalk, it can work at room temperature, suitable for uncooled, real-time, low cost, miniaturized terahertz detectors and arrayed imaging equipment.