我们可以期望先进的基片加工设备不断地快速更新,但是,由于基片加工设备的成本日益高涨而延长其使用期(现在购买一套设备大约需要2百万美元),这是其一;另一方面,基片加工设备技术的领先优势还需要继续改进和革新。在1993年,全世界的半导 We can expect advanced substrate processing equipment to be constantly updated quickly, but one that extends its useful life as the cost of substrate processing equipment continues to rise (it now costs approximately $ 2 million to purchase a single unit) On the one hand, the leading edge of substrate processing equipment technology also needs continuous improvement and innovation. In 1993, the world’s semiconductor