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We fabricate low threshold current monolithic distributed feedback(DFB) laser with a multi-mode interface(MMI) combiner using butt-joint metal-organic chemical vapor deposition technology with different waveguide structures. Multi-layer mask self-aligned photolithography technology is used to form different waveguides in active and passive regions, respectively. The result shows that the laser threshold current is lower than 10 m A, with 50 d B side-mode suppression ratio.
We fabricate low threshold current monolithic distributed feedback (DFB) laser with a multi-mode interface (MMI) combiner using butt-joint metal-organic chemical vapor deposition technology with different waveguide structures. Multi-layer mask self-aligned photolithography technology is used to form different waveguides in active and passive regions, respectively. The result shows that the laser threshold current is lower than 10 m A with 50 d B side-mode suppression ratio.