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由Solie和Kino等人提出的薄膜SAW器件,实际上是一种包括覆盖在非压电基片上的压电薄膜在内的层状结构。适当选择压电薄膜和基片材料,可实现强压电耦合和高温度稳定性,氧化锌(ZnO)薄膜由于它有较高的机电耦合系数(K:(?)0.28)、较好的温度稳定性以
The thin film SAW device proposed by Solie and Kino et al. Is actually a layered structure including a piezoelectric film coated on a non-piezoelectric substrate. The proper selection of the piezoelectric film and the substrate material enables strong piezoelectric coupling and high temperature stability. The ZnO thin film has better electromechanical coupling coefficient (K (?) = 0.28), better temperature Stability to