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装有两块32 400线径向光栅的测角仪正在发展作为角度基准。它已经构成了一种用来对作为工作标准的多齿分度台精度进行正式检定的完整的方法。这项科研项目的目的在于改善测量性能,使得0.1＂的精度能够可靠、迅速、经济地得以实现,测角仪工作台转动的角度测量的对准精度为0.01＂。测角原理如下:一对径向光栅盘以30r/min恒速旋转,南两个读数头扫描,一个读数头保持不动,而另一个随被测的角移动。这样就获得了两路64.800kHz信号,它们之间的相对相位变化表示可动读数基相对于固定读数头的旋转角。由于第二个读数头(装在工作台上)在运动,两路输出信号的相位差不断变化,每转过10＂时变化360°相位周期的总
Goniometers equipped with two 32 400 radial gratings are being developed as angle references. It has formed a complete method for the formal verification of the accuracy of multi-tooth indexing tables as working standards. The goal of this research project is to improve the measurement performance so that a 0.1 “accuracy can be achieved reliably, quickly and economically, and a goniometer stage rotates at an angle of 0.01”. The principle of goniometry is as follows: A pair of radial grating discs are rotated at a constant speed of 30 r / min, two scanning heads of the south are scanned, one reading head is stationary, and the other is moved with the measured angle. This results in two 64.800 kHz signals, the relative phase shift between them representing the angle of rotation of the movable reading base relative to the fixed reading head. Since the second reading head (mounted on the table) is in motion, the phase difference between the two output signals is constantly changing, varying by a total of 360 ° phase periods for each 10 "revolution