某公司发表了反射镜投影法,它是一种将掩模上的图形等倍地光刻在片子上的方法。从像差矫正的观点看,该系统不但趣味浓厚而且在整体结构上也充满着采用扫描法等新想法,它以极其独特的创造赢得了人们的好评。图9.1为其光学系统的基本结构。该 A company published a mirror projection method, which is a mask on the graphics and other photolithography method in the film. From the point of view of aberration correction, this system is not only interesting but also full of new ideas such as the scanning method in the overall structure, and it has won people’s high praise with extremely unique creation. Figure 9.1 shows the basic structure of the optical system. This