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解决真空微电子器件的稳定性和寿命问题,可以扩大场致发射器件的应用范围。本文概述了影响真空微电子场致发射阴极阵列(FEA)发射稳定性的几个因素,认为阴极材料和功函数是决定真空微电子器件发射稳定性的主要因素。最后提出了解决发射稳定的几个建议。
Solve the problem of the stability and life of vacuum microelectronic devices, you can expand the scope of field emission devices. This paper summarizes several factors that affect the emission stability of a vacuum microelectronic field emission cathode array (FEA). It is believed that the cathode material and the work function are the main factors that determine the emission stability of a vacuum microelectronic device. Finally, several suggestions for settling launch stability are put forward.