一、考察概况传感元件是对外界被检测的信息具有响应和转换功能的元件,是传感器的核心部件,半导体敏感元件是传感元件中的一大类。是在近代微电子学、半导体材料以及集成电路工艺基础上发展起来的,目前发展很快。我国开展这方面的研究已有近二十年的 First, the survey At a Glance Sensing element is a component that responds and transforms to the information being detected by the outside world and is the core component of the sensor. Semiconductor sensing elements are a large part of sensing elements. In modern microelectronics, semiconductor materials and integrated circuit technology developed on the basis of the current rapid development. Our country has carried on the research in this respect for nearly two decades