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介绍了利用直流电弧等离子体制备超细AlN粉末的方法。实验结果表明,在N_2-Ar气氛中制备的超细粉末是Al和AlN混合物,而在N_2-NH_3气氛中能制备出高纯度的超细AlN粉末。X射线衍射分析证明,在适当分压比的N_2-NH_3混合气体中所制出的超细AlN粉末不存在Al(即其氮化率达到100％),所得AlN粒子的最大几率直径为5.29nm,几何平均直径为21.0nm。本文最后对电弧等离子体的作用,AlN超细颗粒的生成机理及影响超细粉末中AlN含量的主要因素作了分析。
The preparation of ultrafine AlN powder by DC arc plasma is introduced. The experimental results show that the ultrafine powder prepared in N_2-Ar atmosphere is a mixture of Al and AlN, while the ultrafine AlN powder with high purity can be prepared in N_2-NH_3 atmosphere. X-ray diffraction analysis showed that the AlN powder produced in the N_2-NH_3 mixed gas with the proper partial pressure ratio does not exist Al (that is, the nitriding rate reaches 100%), and the maximum probability diameter of the obtained AlN particles is 5.29 nm , The geometric mean diameter of 21.0nm. In the end of this paper, the effect of arc plasma, the formation mechanism of AlN ultrafine particles and the main factors affecting the AlN content in ultrafine powders are analyzed.