纳米电子器件是微电子器件发展的下一代 ,现有微电子器件的主要材料是极纯的硅、锗和镓砷等晶体半导体。纳米电子器件有可能是以有机或有机 /无机复合晶体薄膜为主要材料 ,要求纯度更高 ,结构更完善。真空制备的清洁环境 ,有希望加工组装出纳米电子器件所要求的结构。故本文建议开展真空化学研究 Nanoelectronic devices are the next generation of the development of microelectronic devices. The main materials of existing microelectronic devices are extremely pure crystalline semiconductors such as silicon, germanium and gallium arsenide. Nano-electronic devices may be organic or organic / inorganic composite crystal film as the main material, requiring higher purity, better structure. Vacuum-prepared clean environment, there is hope that the processing and assembly of nanoelectronic devices required structure. Therefore, this paper proposes to carry out vacuum chemistry research