为了把瓦里安强离子注入机的电压提高到160kV,我们设计了一种新式的高压前级,其束引出和加速是在一个结构紧凑的三间隙电极装置中完成的,此装置的每个间隙电压都按70kV设计。当能量超过70keV时,束流就通过全部三个间隙电极来加速,在70keV和70keV以下时,此装置就可以减速方式工作,束在第一个间隙上以最高电压70kV引出,随后在另外两个间隙上减速到注入能量。本文介绍了这个装置的详细情况和由此得到的束流与能量的关系。 In order to increase the voltage of the Varian ion implanter to 160 kV, we designed a new type of high voltage pre-stage with its beam extraction and acceleration done in a compact three-gap electrode assembly, each of which The gap voltage is designed according to 70kV. When the energy exceeds 70 keV, the beam accelerates through all three gap electrodes. At 70 keV and below 70 keV, the device operates in a decelerating manner. The beam is led at a maximum voltage of 70 kV on the first gap, A deceleration on the gap to inject energy. This article describes the details of this device and the resulting beam and energy relationship.