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本文报道了无定型硅基钝化膜在功率晶体管中的应用情况。实验结果表明:采用此钝化膜有助于改善平面p-n结的电气性能和表面抗污染能力,提高了器件的可靠性和稳定性。对此钝化机理本文也作了相应的讨论。
This paper reports the application of amorphous silicon-based passivation films in power transistors. The experimental results show that using this passivation film can improve the electrical performance and surface anti-pollution ability of planar p-n junction, and improve the reliability and stability of the device. This passivation mechanism also made a corresponding discussion.