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采用２７ＭｅＶ的１２Ｃ５＋作为入射粒子，采用符合弹性前冲方法测量了５．６μｍ的硅样品中氧的含量及其深度分布．实验结果表明，采用１２Ｃ与１６Ｏ符合弹性前冲方法分析硅样品中的氧，其最小探测限可达２０×１０－６（原子比），深度分辨率为～４５０ｎｍ．该方法对于厚样品，尤其比常规弹性前冲优越。
Using 27MeV 12C5 + as the incident particle, the oxygen content and its depth distribution in the 5.6μm silicon sample were measured by the elastic preemption method. The experimental results show that the minimum detectable limit of oxygen is 20 × 10-6 (atomic ratio) and the depth resolution is ~ 450nm. This method is especially advantageous for thick samples, in particular, than conventional elastic lead.