光敏性高分子是一种功能高分子,它已用作为集成电路制造中不可缺少的光致抗蚀剂。随着电子工业的发展,从集成电路到超大规模集成电路的研究和生产,对光致抗蚀剂提出了更高的要求。目前工业上生产的光致抗蚀剂有两种类型:负性抗蚀剂和正性抗蚀剂。一般前 Photosensitive polymers are functional polymers that have been used as indispensable photoresists in the manufacture of integrated circuits. With the development of the electronics industry, research and production from integrated circuits to very large scale integrated circuits have set higher demands on photoresists. Currently, there are two types of industrial photoresists: negative and positive resists. General before