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本文计算了S/D=0.2,0.3,…,1(间隔0.1),孔径比D_1/D_2=5,10,20的非对称磁透镜在激励参数V_1/(NI)~2=0.004～0.024[伏/(安·匝)~2](间隔0.002)时的电子光学参量。磁场强度的计算采用有限差分法并经电阻网模拟实验验证是正确的,得到了轴上磁场强度的相对分布曲线,轴上磁场强度的最大值及最大值所在位置的计算公式。用变步长Runge-Kutta数值积分方法求解了旁轴电子轨迹方程并描绘了非对称磁透镜中典型的物方主轨迹和象方主轨迹,分析了在强激励情况下的差异。计算了完整的高斯光学参量(包括物镜物方焦距,物镜象方焦距,物镜物方焦点坐标,物镜象方焦点坐标;投影镜物方焦距,投影镜象方焦距,投影镜物方焦点坐
In this paper, the asymmetric magnetic lens with S / D = 0.2, 0.3, ..., 1 (interval 0.1) and aperture ratio D_1 / D_2 = 5, 10, 20 are calculated under excitation parameters of V_1 / (NI) Volts / (ampere turns) ~ 2] (interval 0.002) when the electronic optical parameters. The calculation of the magnetic field strength is verified by the finite difference method and the resistance network simulation experiment. The relative distribution curve of the magnetic field strength on the shaft, the maximum value of the magnetic field strength on the shaft and the calculation formula of the maximum position are obtained. The variable-length Runge-Kutta numerical integration method was used to solve the paraxial electron trajectory equation and to depict the typical object-side main trajectory and the image-side main trajectory in the asymmetric magnetic lens. The differences under strong excitation were analyzed. The complete Gaussian optical parameters are calculated, including the focal length of object, the focal length of object lens, the focal point of object lens and the focal point of object lens; the focal length of object, the focal length of projection lens, the focal point of object