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针对深反应离子刻蚀(DRIE)工艺加工高深宽比梳齿电容存在侧壁倾斜角的情况,分析了该倾斜角对梳齿谐振器频率的影响。为了使设计的梳齿谐振器频率符合应用要求,推导出了梳齿谐振器在正负侧壁倾斜角θ下的谐振频率计算公式。利用ANSYS Workbench11.0平台,分别对侧壁倾斜角为0°,0.2°,0.35°和0.5°的情形进行了有限元建模与模态仿真。仿真结果表明:随着正倾斜角的增大,谐振频率减小;负倾斜角增大时,谐振频率增大,且一阶模态振形的平稳程度越差。比较数值仿真结果与考虑了正负倾斜角误差的梳齿谐振器谐振频率计算公式计算结果对比,吻合较好。
The effect of the tilt angle on the frequency of the comb-tooth resonator is analyzed in view of the sidewall tilt angle of the deep-width-ratio comb capacitor processed by deep reactive ion etching (DRIE). In order to make the designed comb-tooth resonator frequency accord with the application requirement, the formula of resonance frequency of comb-tooth resonator at the positive and negative side-wall tilt angle θ is deduced. Using ANSYS Workbench11.0 platform, finite element modeling and modal simulation were carried out on the condition that the tilt angle of the sidewalls was 0 °, 0.2 °, 0.35 ° and 0.5 ° respectively. The simulation results show that the resonance frequency decreases with the increase of the positive tilt angle, and the resonance frequency increases with the increase of the negative tilt angle, and the smoothness of the first-order mode shape becomes worse. Comparing the results of numerical simulation with the calculation results of the resonance frequency of the comb resonator considering the positive and negative tilt angle errors, the results are in good agreement.