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四机部一四四八研究所的工程技术人员,经过了多年的探索研究,于最近研究成功具有国内先进水平的我国第一台高精度电子束曝光机。电子束曝光是六十年代才开始发展起来的一门崭新技术,由于它本身所具有的加工线条细、精度高等优点,所以为制作大规模、超大规模集成电路以及微波、磁泡、声表面波、光集成等新型电子器件提供了一种
After a long period of exploration and research, engineers and technicians of the 1448 Institute of the Fourth Machinery Division successfully researched and successfully developed the first high-precision electron beam exposure machine with the advanced domestic level in China recently. Electron beam exposure is a brand-new technology that began to develop only in the 1960s. Due to its fine processing lines and high precision, it has been widely used in the production of large-scale, VLSI and microwave, bubble, surface acoustic wave , Optical integration and other new electronic devices provide a