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力平衡式真空微电子加速度传感器的惯性敏感元件不仅受弹性力的作用,同时还受静电力的作用,其总刚度为机械刚度和由静电力引入的电学刚度之和。本文利用平行板电容器模型计算发射电极间的静电力,并引入一个修正系数描述发射锥尖阵列的影响,对传感器性能进行了理论分析。分析表明,提高偏置电压可以改善传感器的线性度和灵敏度,通过调节偏置电压来调整系统的刚度和阻尼比可使其具有更好的动态特性。由于静电吸合效应的影响,质量块的位移必须小于偏置电极间初始间距的1/3 ,系统才能稳定。为了获得较好的动态特性,需要确定一个由偏置电压决定的优化工作点。实验结果表明,当设置发射电压和反馈偏置电压分别为1.953 V和5.478V时,该真空加速度传感器的灵敏度达到557mV/g,非线性度为0.95%,传感器系统具有良好的性能。
The inertial sensitive element of the force balanced vacuum micro-accelerometer is not only affected by the elastic force, but also affected by the electrostatic force. Its total stiffness is the sum of the mechanical stiffness and the electrical stiffness introduced by the electrostatic force. In this paper, the parallel plate capacitor model was used to calculate the electrostatic force between the emitter and the emitter, and a correction coefficient was introduced to describe the influence of the emitter cone array. The performance of the sensor was analyzed theoretically. The analysis shows that increasing the bias voltage can improve the linearity and sensitivity of the sensor. By adjusting the bias voltage to adjust the stiffness and damping ratio of the system, it can have better dynamic characteristics. Due to the electrostatic pull-in effect, the mass displacement must be less than 1/3 of the initial spacing between bias electrodes to stabilize the system. In order to obtain better dynamic characteristics, it is necessary to determine an optimized operating point determined by the bias voltage. Experimental results show that the sensitivity of the vacuum accelerometer reaches 557mV / g and the nonlinearity is 0.95% when the emission voltage and the feedback bias voltage are 1.953 V and 5.478 V, respectively. The sensor system has good performance.