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介绍一种具有纳米级测量灵敏度的非接触光探针平整度测试仪 ,其分辨率优于 1nm。这种测试仪在电子玻璃、半导体、集成电路、薄膜和纳米技术等领域都有很大的应用前景。给出了该测试仪在液晶显示器件基板表面形状研究方面的一些应用的实验测试数据结果 ,表明该测试仪可以在液晶显示器件研究中发挥作用
A non-contact optical probe flatness tester with nanometer-scale measurement sensitivity is introduced with a resolution of better than 1 nm. This tester has great application prospects in the fields of electronic glass, semiconductors, integrated circuits, thin films and nanotechnology. Some experimental results of the test on the surface shape of liquid crystal display substrate are given, which shows that the tester can play a role in the research of liquid crystal display