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研究对环境振动和空气扰动所造成的两相干光束间常数项光程变化不敏感的自适应移相干涉系统。利用偏振分光技术 ,采用闭环控制 ,并将高频振幅调制与锁相技术相结合 ,建立一斩波式自适应移相干涉系统 ,可对环境振动引起的干涉条纹的抖动进行实时探测并予以光程补偿 ,将干涉条纹依次锁定在与任意相位差相对应的位置。该方法不受两相干光束间光程差大小的限制且具有高信噪比。阐述了该方法的原理 ,描述了所建立的系统 ,并给出了实验结果
The adaptive phase-shifting interferometry system which is insensitive to the optical path change of the constant term between two coherent beams caused by environmental vibration and air disturbance is studied. The use of polarization splitting technology, the use of closed-loop control, and the combination of high-frequency amplitude modulation and phase-locked technology to establish a chopper adaptive phase shifting interference system can be detected in real-time vibration jitter caused by environmental vibration and light Program compensation, the interference fringes in turn locked at any position corresponding to the phase difference. The method is not limited by the optical path length difference between two coherent beams and has a high signal-to-noise ratio. The principle of this method is expounded, the established system is described, and the experimental results are given