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本文把用H_2—N_2混合气体进行离子氮化的两三种钢材表面所形成的化合物层厚度、相组成物等同用纯氮气进行离子氮化的结果作了对比,并研究了离子氮化中氢气的作用。特别是应用了光电子分光分析法(ESCA)对氢离子溅射的表面净化作用作了进一步的研究。在纯氮气氛中进行离子氮化的处理时,微最氧的氧化作用明显地损害了氮化的效果;而离子氮化过程中氢气的存在对氮化反应具有很好的效果。通过氢离子的溅射加热可以去除在氢气中用电加热器加热难以去除的钢表面上所形成的碳氢化物和氢氧化物或吸附水的OH系污染层,从而表明了氢离子溅射的表面的净化作用。
In this paper, two or three kinds of H_2-N_2 mixed gas nitriding of the surface of the compound layer thickness of the compound formed by the phase composition with pure nitrogen ion nitriding results were compared and studied the ionic nitriding of hydrogen Role. In particular, the application of photoelectron spectroscopy (ESCA) on hydrogen ion sputtering surface purification further studied. In the case of ion nitriding in a pure nitrogen atmosphere, the oxidation of the micro-oxygen greatly impairs the nitriding effect; and the presence of hydrogen in the ion nitriding process has a good effect on the nitriding reaction. The hydrogen-based sputtered heating removes the hydrocarbon-based and hydroxide-forming or water-adsorbed OH-based contaminants formed on the surface of the steel that is difficult to remove by heating with an electric heater in hydrogen gas, Purification of the surface.