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ZrN films were deposited on Si(111) and M2 steel by inductively coupled plasma(ICP)-enhanced RF magnetron sputtering.The effect of ICP power on the microstructure,me-chanical properties and corrosion resistance of ZrN films was investigated.When the ICP poweris below 300 W,the ZrN films show a columnar structure.With the increase of ICP power,thetexture coefficient (T_c) of the (111) plane,the nanohardness and elastic modulus of the films in-crease and reach the maximum at a power of 300 W.As the ICP Power exceeds 300 W,the filmsexhibit a ZrN and ZrN_x mixed crystal structure without columnar grain while the nanohardnessand elastic modulus of the films decrease.All the ZrN coated samples show a higher corrosionresistance than that of the bare M2 steel substrate in 3.5% NaCl electrolyte.The nanohardnessand elastic modulus mostly depend on the crystalline structure and T_c of ZrN(111).
ZrN films were deposited on Si (111) and M2 steel by inductively coupled plasma (ICP) -enhanced RF magnetron sputtering. The effect of ICP power on the microstructure, me-chanical properties and corrosion resistance of ZrN films was investigated. What the ICP poweris below 300 W, the ZrN films show a columnar structure. Where the increase of ICP power, the texture coefficient (T_c) of the (111) plane, the nanohardness and elastic modulus of the films in-crease and reach the maximum at a power of 300 W.As the ICP Power exceeds 300 W, the filmsexhibit a ZrN and ZrN_x mixed crystal structure without columnar grain while the nanohardnessand elastic modulus of the films decrease. All the ZrN coated samples show a higher corrosion resistance than that of the bare M2 steel substrate in 3.5% NaCl electrolyte. The nanohardness and elastic modulus mostly depend on the crystalline structure and T_c of ZrN (111).