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采用光纤探针的扫描近场光学显微镜 (SNOM)存在某些弱点 ,如探针特别脆 ,不易贴近样品表面扫描 ,探针的转输效率低等。近年来发展了将SFM /SNOM结合起来的扫描探测显微镜。利用微加工工艺技术 ,将小孔集成在悬臂探针中 ,使探针既能批量制备 ,又具有很好的重复性。探针悬臂在垂直于样品表面方向上的弹性常数较小 ,针尖不易损坏。在接触模式中利用这种SFM /SNOM组合探针可将样品的形貌像、摩擦力和光学透射像等信息同时记录下来。对于综合研究样品表面的介观性质十分有利。
Scanning near-field optical microscopy (SNOM) with fiber-optic probes has some weaknesses, such as extremely brittle probes, poor access to the surface of the sample, and poor probe delivery. In recent years, the development of the SFM / SNOM combined scanning and scanning microscope. The use of micro-processing technology, the hole integrated in the cantilever probe, the probe can both batch preparation, but also has good repeatability. The elastic constant of the probe cantilever in the direction perpendicular to the sample surface is small, and the tip is not easily damaged. The use of this SFM / SNOM combinatorial probe in contact mode allows simultaneous recording of sample morphology, friction and optical transmission images. It is very beneficial for the comprehensive study of the mesoscopic properties of the sample surface.