对用于ArF准分子激光器的CaF2衬底进行了表征实验研究。采用分光光度计测量了CaF2衬底的透射光谱和反射光谱,利用激光量热法测量了CaF2衬底吸收,分别利用原子力显微镜(AFM)和白光干涉仪(WLI)测量了CaF2衬底的表面粗糙度,并计算了功率谱密度(PSD)和表面散射,最后分别测量了CaF2衬底的荧光光谱、红外光谱和拉曼光谱。激光量热法测量5 mm厚准分子级CaF2衬底的吸收结果为922×10-6。AFM和WLI测得的CaF2衬底表面粗糙度均方根值分别为0.22和1.24 nm,计算表面散射损耗分别为0.005%和0.25%。荧光光谱在紫外(UV)级CaF2衬底中检测到Ce3+等杂质离子。红外光谱和拉曼光谱在CaF2衬底表面没有检测到水气和有机污染物。实验结果表明,激光量热法可以精确地测量和评价准分子级CaF2衬底的吸收,表面粗糙度的测量结果需要与散射的实测结果综合起来进行评价,荧光和红外等光谱技术是检测CaF2衬底内部痕量杂质及表面污染的有效手段。 CaF2 substrates for ArF excimer laser were characterized experimentally. The transmission and reflection spectra of CaF2 substrate were measured by spectrophotometer. The CaF2 substrate absorption was measured by laser calorimetry. The surface roughness of CaF2 substrate was measured by atomic force microscope (AFM) and white light interferometer (WLI) (PSD) and surface scattering were calculated. Finally, the fluorescence spectra, infrared spectra and Raman spectra of CaF2 substrates were measured. The absorption of 5 mm thick excimer-type CaF2 substrate by laser calorimetry was 922 × 10-6. The root mean square roughness of the surface of the CaF2 substrate measured by AFM and WLI was 0.22 and 1.24 nm, respectively. The calculated surface scattering losses were 0.005% and 0.25%, respectively. Fluorescence spectra of impurity ions such as Ce3 + were detected in UV-grade CaF2 substrates. Infrared and Raman spectroscopy No moisture and organic contaminants were detected on the CaF2 substrate surface. The experimental results show that the laser calorimetry can accurately measure and evaluate the absorption of the quasi-molecular CaF2 substrate. The measurement results of the surface roughness need to be evaluated in combination with the actual measured results of scattering. The fluorescence and infrared spectroscopy techniques are used to detect the CaF2 End of the internal trace impurities and surface contamination of the effective means.