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利用多靶磁控溅射法制备MoS_2基系列复合薄膜,通过扫描电子显微镜、X-ray衍射、拉曼光谱对薄膜微观形貌及晶体结构进行表征,利用纳米压入表征薄膜硬度及弹性模量,通过微动摩擦磨损试验对比分析了该系列薄膜在大气环境下的润滑性能.研究结果表明:MoS_2薄膜中复合C、Ti元素可有效抑制薄膜生长过程中柱状结构的形成,薄膜更为致密;复合薄膜的摩擦系数及磨损率显著降低.其中,MoS_2+C+Ti三元复合薄膜硬度为7.43 GPa,其弹性模量及弹性恢复量分别为98.1 GPa和61.7%.在大气环境(RH 35%~50%)下,法向载荷10 N时MoS_2+C+Ti薄膜具有最低的磨损率4.67×10–17 m~3/(N·m),该薄膜在不同载荷的微动摩擦试验中均具有最好的承载力.
The multi-target magnetron sputtering method was used to prepare MoS 2 -based composite films. The morphology and crystal structure of the films were characterized by scanning electron microscopy, X-ray diffraction and Raman spectroscopy. The hardness and elastic modulus The results show that the composite C and Ti elements can effectively inhibit the formation of columnar structure during the film growth and the film is denser. The friction coefficient and wear rate of the composite films decreased significantly, the MoS 2 + C + Ti ternary composite films with hardness of 7.43 GPa and elastic modulus and elastic recovery of 98.1 GPa and 61.7% ~ 50%), the MoS_2 + C + Ti film has the lowest wear rate of 4.67 × 10-17 m ~ 3 / (N · m) at normal load of 10 N. Has the best bearing capacity.