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直接用难熔金属小舟加热蒸发二氧化锗时会发生强烈的化学反应。文中提出了一种简?可行的蒸发器,可用于普通蒸发设备上制得性能良好的GeO_2薄膜。二氧化锗薄膜具有比一氧化硅优良的介电性能。选择适当的工艺参数可以得到ε> 8。
Direct use of refractory metal boat heating evaporation of germanium dioxide occurs when a strong chemical reaction. In this paper, a simple and feasible evaporator is proposed, which can be used to prepare GeO_2 film with good performance on common evaporation equipment. GeO2 thin films have superior dielectric properties over silicon monoxide. Select the appropriate process parameters can be ε> 8.