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描述了用高功率脉冲激光打靶产生的等离子体作为软Ｘ射线源而进行的接近式软Ｘ射线光刻研究。采用负性辐射线光刻胶聚氯甲基苯乙烯（ＰＣＭＳ），得到了一些新的实验结果。
Describes a close-in soft X-ray lithography study of plasmas generated by high power pulsed laser shots as soft X-ray sources. Some new experimental results were obtained by using PCMS as negative photoresist.