采用溶胶 -凝胶法在普通玻璃载片上制备了Al2 O3 薄膜 .通过XRD ,DSC -TGA以及椭圆偏振测厚仪等测量手段研究了勃姆石溶胶的制备条件 ,氧化铝薄膜的光学参数以及勃姆石凝胶在热处理过程中的物理变化 .结果表明 :异丙醇铝的浓度、水解温度和胶溶剂的加入量直接影响了勃母石溶胶的稳定性 .45 0℃热处理所得薄膜单层厚度为 31.3nm ,折射率为 1.72 ,表面均匀 ,透光性好 Al 2 O 3 thin films were prepared on common glass slides by sol-gel method.The preparation conditions of boehmite sol, such as XRD, DSC-TGA and ellipsometry were studied. The optical parameters of Al 2 O 3 films, The results show that the concentration of aluminum isopropoxide, the temperature of hydrolysis and the addition of peptizer have a direct impact on the stability of boehmite sol. The thickness of single layer of 45 ℃ heat treatment 31.3nm, refractive index of 1.72, uniform surface, good light transmission