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概述了微观测试技术的内涵及其发展趋势,分析了它的特点、作用、地位以及二十一世纪初十年代的要求,展望了该技术未来的发展趋势。
The connotation and development trend of microscopic test technology are summarized. Its characteristics, functions and status as well as requirements of the early decade of the 21st century are analyzed. The development trend of the technology in the future is prospected.