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本试验采用溶胶-凝胶工艺在印有电极的石英玻璃表面,通过浸渍-提拉法制备稀土离子掺杂的TiO2-20wt%SnO2复合薄膜.研究当测试频率为0.01 kHz时,烧结温度和稀土掺杂量对薄膜湿敏性能的影响.试验结果表明:在400℃和500℃下烧结的薄膜的湿敏性能要优于在600℃和700℃烧结的薄膜的湿敏性能;掺杂稀土离子的薄膜的感湿性能得到了改善,固有阻值降低;400℃烧结的0.5wt%La2O3掺杂的薄膜在45~95RH%湿度范围内阻抗值下降两个数量级;500℃下烧结的0.2wt%CeO2掺杂的薄膜在25~95RH%湿度范围内阻抗值下降两个数量级.
In this study, rare earth ion-doped TiO2-20wt% SnO2 composite films were prepared by immersion-pulling method using a sol-gel process on the surface of quartz glass printed with electrodes.When the test frequency was 0.01 kHz, the sintering temperature and rare earth The results show that the humidity sensitive properties of films sintered at 400 ℃ and 500 ℃ are better than those of films sintered at 600 ℃ and 700 ℃. The doping rare earth ions , The intrinsic resistance decreased. The 0.5wt% La2O3-doped films sintered at 400 ℃ decreased by two orders of magnitude in the 45-95 RH% humidity range. The 0.2wt% The CeO2-doped films showed a drop of two orders of magnitude in impedance over the 25-95 RH% humidity range.