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选取能量为80keV、剂量范围为1×10~(16)-8.3×10~(17)N~+·cm~(-2)的氮离子对 L2,LD2,LF12,LY12,Al-4%Cu 等 Al 合金进行氮离子注入,并用 X 射线光电子能谱及透射电子显微镜分析了氮离子注入层的价态特征及组织结构特点。在此基础上进行了硬度及耐磨性试验。氮离子注入到 Al 及 Al 合金中在室温下能形成细小弥散的 AlN 析出相;氮离子注入加速了 Al-4%Cu 合金的时效析出过程。Al 及 Al 合金表层硬度及耐磨性随着氮离子注入剂量的增加而提高。
Nitrogen ion pairs L2, LD2, LF12, LY12, Al-4% Cu with energy of 80keV and dose range of 1 × 10 ~ (16) -8.3 × 10-17 N ~ + · cm ~ And other Al alloys were implanted with nitrogen ions. The valence state and microstructure of the nitrogen ion implanted layer were analyzed by X-ray photoelectron spectroscopy and transmission electron microscopy. On this basis, the hardness and wear resistance tests were carried out. Nitrogen ions can be injected into Al and Al alloys to form fine and dispersed AlN precipitates at room temperature. Nitrogen ion implantation accelerated the precipitation process of Al-4% Cu alloy. Al and Al alloy surface hardness and wear resistance with the nitrogen ion implantation dose increases.