硅微电子系统是超大规模集成电路技术的最重要的应用领域。它的设计与制备必须按照VLSI的技术特点,以求充分发挥VLSI能力与潜力。 硅微电子系统无论在设计或在工艺制备方面均应按照“自顶向下”及“由底向上”的方法学。它们均可以采用结构式单元库为基础的体制。硅微电子系统是VLSI研究工作的出发点。设计与制备技术的类比对照,互相渗透与借鉴,必将使微电子系统得到迅速发展。 Silicon microelectronic systems are the most important application areas for VLSI technology. Its design and fabrication must be in accordance with the technical features of VLSI in order to maximize the capabilities and potential of VLSI. Silicon microelectronic systems should follow the “top-down” and “bottom-up” methodology, both in design and in process preparation. They are all based on a structured cell library. Silicon microelectronic system is the starting point of VLSI research work. Analogy between design and preparation technology, mutual penetration and reference, will make the rapid development of microelectronic systems.