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以乙酰丙酮铈和乙酰丙酮锆为前驱盐,以正丙酸和异丙醇为溶剂获得了前驱液。用化学溶液方法(CSD)在YSZ和自制的NiW基底上制备出了Ce1-xZrxO2过渡层。研究了前驱液成分、性质以及退火温度对其成相和取向的影响。用常规XRD分析其相成分和织构。结果表明,优化工艺下获得的纯CeO2和Zr掺杂的CeO2薄膜均具有良好的立方织构。通过X射线四环衍射仪测出的Ce1-xZrxO2过渡层的(111)Φ扫描和(200)摇摆曲线的半高宽值说明其具有很强的双轴织构。另外,Zr掺杂获得的薄膜的表面质量得到了明显改善,晶粒也得到了细化。
The precursors were prepared from the precursors of cerium acetylacetonate and zirconium acetylacetonate, n-propionic acid and isopropanol. Ce1-xZrxO2 interlayers were prepared on YSZ and self-made NiW substrates by chemical solution method (CSD). The effects of precursor composition, properties and annealing temperature on the phase and orientation were investigated. Its phase composition and texture were analyzed by conventional XRD. The results show that the pure CeO2 and Zr-doped CeO2 films obtained by the optimized process all have good cubic texture. The (111) Φ scan of the Ce1-xZrxO2 transitional layer and the full width at half maximum of the (200) rocking curve measured by the X-ray four-ring diffractometer indicate that it has a strong biaxial texture. In addition, the surface quality of the films obtained by Zr doping has been significantly improved, and the grains have also been refined.