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在扫描隧道显微镜轮廓测量过程中，探针自身的几何形状会混入测量结果中，从而造成相应的测量误差。本文提出了根据对标准样品的测量结果，反算出探针的几何形状的算法，并应用于实测图像求解出探针的几何形状。在求得探针的几何形状后，文中推导了去除探针几何形状造成的误差，对扫描隧道显微镜图像进行重建的算法，并对实测样品进行了处理。结果表明上述算法可有效地减小探针自身形状造成的测量误差。
During the scanning tunneling microscope profile measurement, the probe’s own geometry mixes into the measurement results, resulting in corresponding measurement errors. In this paper, an algorithm of back calculating the geometry of the probe based on the measurement results of the standard sample is proposed and applied to the measured image to solve the geometry of the probe. After obtaining the geometry of the probe, an algorithm to remove the error caused by the geometry of the probe and to reconstruct the scanning tunneling microscope image is deduced and the measured samples are processed. The results show that the above algorithm can effectively reduce the measurement error caused by the probe’s own shape.