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论述了气体摆的机理,分析了密闭腔中自然对流气体的浮升力及浮升力与温度变化的关系式。该文给出了二维微机械气体摆式加速度计与倾角传感器的结构原理和信号处理电路,并通过对实际制作的两维微机械气体摆式加速度计和倾角传感器样机进行测试。结果表明,在±7 g和±25°时,两维微机械加速度计和微机械倾角传感器的非线性度均小于1%FS。
The mechanism of gas pendulum is discussed. The relation between the buoyancy force of natural convection gas in the sealed chamber and the change of buoyancy and temperature is analyzed. In this paper, the structural principle and signal processing circuit of two-dimensional micro-mechanical gas pendulum accelerometer and tilt sensor are given, and the two-dimensional micro-mechanical gas pendulum accelerometer and tilt sensor prototype are tested. The results show that the nonlinearity of two-dimensional micro-mechanical accelerometers and micromechanical dip sensors are less than 1% FS at ± 7 g and ± 25 °.