论文部分内容阅读
伊尔梅瑙工业大学过程测量和传感技术研究所研制了三维纳米定位和测量机 (NPMM ) .阿贝无偏设计使得该机器异常精确 .在整个 2 5mm× 2 5mm× 5mm的定位和测量域内 ,干涉测长系统分辨力可达 0 .1nm ,不确定度达 5～ 10nm .提供了纳米定位测量机的基本信息 ,介绍其操作模式 ,并给出了测量结果
The Institute of Process Measurement and Sensing Technology at Ilmenau Polytechnic University developed a three-dimensional nanopositioning and measuring machine (NPMM). Abbe’s unbiased design makes the machine exceptionally accurate. Throughout the positioning and measurement of 2 5mm x 2 5mm x 5mm In the field, the resolution of interferometric length measuring system can reach 0 .1nm with uncertainty of 5 ~ 10nm. The basic information of nano-positioning measuring machine is provided, its operation mode is introduced, and the measuring result