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由钠光灯照明双频光栅干涉仪获得了低噪声的剪切干涉条纹,并能用于制作不同空间频率的光栅和透镜像差的测量。讨论了钠光灯照明下光栅自成像平面的光场相干性和利用钠光照明的太保效应进行光栅的复制和微小位移的测量方案。
The low-noise shear fringe fringes obtained by the sodium-light illuminated dual-frequency grating interferometer can be used to make grating and lens aberration measurements at different spatial frequencies. Discusses the light field coherence of the grating from the imaging plane under the sodium light illumination and the measurement scheme of raster duplication and microdisplacement using the sodium protection effect of sodium light illumination.