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本文提出了两种新结构MCT器件,通过器件模拟器PISCES-ⅡB对其关断机理进行了二维数值求解.采用自对准三重扩散工艺,成功地实现了两种新结构MCT器件,其电流关断能力分别达到114A/cm2和41A/cm2.
In this paper, two new structures of MCT devices are proposed. Their shutdown mechanisms are solved numerically by the device simulator PISCES-IIB. By using the self-aligned triple diffusion process, two new MCT devices have been successfully realized with the current cut-off of 114A / cm2 and 41A / cm2, respectively.