The LiSiPON electrolyte films were prepared by magnetron sputtering method with different N2working pressure. The struct......

用0．5Li3PO4-0．5Li2SiO3为靶材，用射频磁控溅射的方法在N2气氛中制备了非晶结构的固态电解质LiSiPON薄膜。N和Si的引入提高了Li2O-P2O......