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用等离子体激活的化学气相淀积(PCVD)方法在比表面大的多孔玻璃上淀积纯 SnO_2,得到稳定性好、工作温度低及选择性较好的气敏薄膜元件。研究了该元件对 H_2、C_2H_5OH、LPG(液化石油气)等气体的气敏效应,对元件的检测机理作了一些探讨,并与用烧结法制备的元件的气敏性能进行了比较。
Plasma-activated chemical vapor deposition (PCVD) method is used to deposit pure SnO 2 on large-area porous glass to obtain gas-sensitive thin-film elements with good stability, low working temperature and good selectivity. The gas sensing effect of H_2, C_2H_5OH and LPG (liquefied petroleum gas) was studied. The detection mechanism was also discussed. The gas sensitivities of the devices prepared by sintering were compared.