近年来,GaN电力半导体的研发日益活跃。与采用Si电力半导体相比,GaN电力半导体应用于逆变器、转换器等的电力转换装置,可大幅提高效率,并实现小型化。富士通研究所与古河电气工业等组成的企业集团、美国IR公司、日本三垦公司、NEC与NEC电子组成的企业集团以及松下公司均已着手研发该类产品。目前,GaN电力半导体研发的焦点之一是底板的选择。GaN底板有助于提 In recent years, research and development of GaN power semiconductors have become increasingly active. The use of GaN power semiconductors for power converters in inverters, converters, and the like, as compared with Si power semiconductors, greatly improves the efficiency and achieves miniaturization. Fujitsu Research Institute and the Furukawa Electric Industrial Group, the United States IR Corporation, Japan Sanken, NEC and NEC Electronics Group, as well as Panasonic companies have begun to develop such products. Currently, GaN power semiconductor research and development is one of the focus of the choice of floor. GaN floor helps to mention