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采用激光微细熔覆柔性直写技术在陶瓷基板上制备厚膜电阻。该技术的优点是精度高、速度快、不需要制作掩模板等。大量研究结果表明,搭接量的改变对电阻的组织性能影响很大,而组织性能对最终整个器件的质量起决定作用。因此,获得最佳搭接量制备出性能优良的电阻元件成为重要的研究课题。针对陶瓷基板,系统地研究了搭接量对厚膜电阻的组织性能的影响规律,获得了形成电阻膜的最佳搭接量为单道扫描光斑直径的3/5,并对影响组织性能的主要机理进行了分析。
Thick-film resistors are fabricated on ceramic substrates by laser micro-cladding flexible direct write technology. The advantages of this technology are high precision, fast speed, no need to make mask board and so on. Numerous studies have shown that the amount of lap changes greatly affect the resistance of the organization, and the organizational performance of the final device quality plays a decisive role. Therefore, to obtain the best amount of overlap to prepare excellent resistance of the resistor becomes an important research topic. For the ceramic substrate, the influence of the amount of overlap on the microstructure and properties of the thick film resistor has been systematically studied. The best overlap of the resistor film is about 3/5 of the diameter of the single scanning spot, and the influence on the microstructure and mechanical properties The main mechanism is analyzed.