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利用溶胶-凝胶旋转涂膜法在耐热玻璃衬底上制备了不同膜厚的Na/Mg共掺ZnO薄膜。重点研究了膜厚对Na/Mg共掺ZnO薄膜结构和光学特性的影响。扫描电子显微镜(SEM)图像和X射线衍射(XRD)图谱分析结果表明,膜厚为200~500 nm时,随着膜厚的增加,薄膜的结晶性、致密性及c轴择优取向生长特性都呈现出先增强后降低的趋势。透射光谱分析结果表明,薄膜在可见光范围内的平均透光率随着膜厚的增加而显著下降。实验条件下,膜厚约为300 nm的Na/Mg共掺ZnO薄膜具有优良的结构特性和透光特性。荧光光致发光(PL)谱表明该薄膜中缺陷很少,是优良的紫外发光材料。
Na / Mg codoped ZnO thin films with different film thicknesses were prepared on heat-resistant glass substrates by sol-gel spin coating. The effects of film thickness on the structure and optical properties of Na / Mg codoped ZnO thin films have been studied. Scanning electron microscopy (SEM) images and X-ray diffraction (XRD) pattern analysis showed that the crystallinity, compactness and c-axis preferred orientation growth of the films were all increased with the film thickness increasing from 200 nm to 500 nm Showing the first increase and then reduce the trend. Transmission spectral analysis showed that the average transmittance of the film in the visible range decreased significantly with the increase of film thickness. Under the experimental conditions, Na / Mg codoped ZnO thin films with film thickness of about 300 nm have excellent structural and optical properties. Fluorescence photoluminescence (PL) spectra show that the film has few defects and is an excellent UV luminescent material.