论文部分内容阅读
激光干涉测量已由研究阶级迅速地进入到实验室和工厂中实际应用。其基本用途是高精度地测量长度或物体的座标,以及测量光学元件或光学系统的参数和质量。激光光源的基本优点是相干长度大,强度高,但是也会带来杂乱多重条纹图形。利用了一种激光干涉仪来测量表面半径以及对高质量镜头的透镜镜片定位,以使其高精度地定中心和确定间隔。还利用了一种偏振系统来消除不需要的条纹图形并平衡干涉仪各条光路的光强度。本文着重介绍了激光干涉仪在组装各种制作集成电路掩模用的精密镜头方面的应用。
Laser interferometry has rapidly come into the lab and factory practical applications from the research class. Its basic purpose is to measure the length or the coordinates of an object with high accuracy and to measure the parameters and the quality of the optical element or the optical system. The basic advantages of laser light sources are coherent length, high intensity, but also messy multi-stripe pattern. A laser interferometer is used to measure the surface radius and position the lens of a high-quality lens so that it centers precisely and determines the spacing. A polarization system is also utilized to eliminate unwanted fringe patterns and to balance the light intensity across the optical path of the interferometer. This article focuses on the application of laser interferometers in the assembly of a wide variety of precision lenses for integrated circuit masks.