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薄膜隧道型约瑟夫逊结在精密测量,微波及计算机等方面有着广泛的应用,这种结的制作关键是形成一个厚度合适、质量好的氧化层作势垒,铅薄膜隧道型约瑟夫逊结的氧化铅膜厚度为10～30A。因此对氧化铅膜厚度的测量和性质的研究有着重要的实际意义。本文对测量氧化铅薄膜的厚度的椭圆偏光法进行了探讨。提出了两种测量铅膜复数折射率的方法。作出了测量氧化铅薄膜厚度用的(n,d)～((?),△)数据表。进而对铅膜分别在空气中和一个大气压的高纯氧中的氧化规律进行了研究。
Thin film tunnel-type Josephson junctions in the precision measurement, microwave and computer has a wide range of applications, the junction of the key to the formation of a suitable thickness, good quality oxide layer as a barrier, lead-film tunnel-type Josephson junction lead oxide Film thickness of 10 ~ 30A. Therefore, the measurement of lead oxide film thickness and the nature of the study has important practical significance. In this paper, the thickness of the oxide film measured by ellipsometry was discussed. Two methods to measure the complex refractive index of lead film are proposed. A (n, d) ~ (?), △) data sheet for measuring the thickness of the lead oxide film was made. Then the oxidation rules of lead film in high purity oxygen in air and one atmosphere respectively were studied.