论文部分内容阅读
美通用仪器公司获得了麻省理工学院有关用 X 射线制造微电子器件的专利权。该公司将利用该专利技术发展为商品生产程序工艺,这将使元器件的尺寸缩小90%。
Midea Instruments acquired the Massachusetts Institute of Technology patent for the manufacture of microelectronic devices using X-rays. The company will use the patented technology to develop into a commercial process for manufacturing processes, which will reduce the size of components by 90%.