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本文用氦载气熔化-气相色谱建立了红外吸收法测定硅单晶中间隙氧的标定曲线.由于熔化法中实验条件的控制和试样准备的改进,降低了空白,提高了数据的重现性,做出较可靠的标定曲线(其换算常数为6.2ppmA/cm~(-1)).优于文献中其它的标定曲线.
In this paper, the calibration curves of infrared oxygen absorption method for the determination of interstitial oxygen in silicon single crystal were established by helium carrier gas melting-gas chromatography. Due to the control of experimental conditions and the improvement of sample preparation in the melting method, the blank is reduced and the data reproduction is improved , And a more reliable calibration curve (with a conversion constant of 6.2ppmA / cm ~ (-1)) is obtained, which is better than other calibration curves in the literature.