一、引言在许多新的领域里,微机控制的仪器仪表和系统被广泛应用。这些系统一般由一个或多个传感器构成,传感器的低电平输出信号先要通过信号调节电路放大,再传送到远距离的微机去处理或控制。硅传感器技术的发展,已能将传感器和信号调节电路合并在一起,成为一个集成传感器。硅压阻式集成压力传感器由Bicking设计成功。这种传感器把敏感元件、温度补偿、信号放大和调整功能都集成在同一芯片 I. INTRODUCTION In many new fields, microcomputer-controlled instrumentation and systems are widely used. These systems are generally composed of one or more sensors, the sensor low-level output signal first through the signal conditioning circuit to enlarge, and then sent to the remote computer to handle or control. The development of silicon sensor technology, has been able to sensor and signal conditioning circuit together to become an integrated sensor. Silicon piezoresistive integrated pressure sensor designed by Bicking success. This sensor to sensitive components, temperature compensation, signal amplification and adjustment functions are integrated in the same chip